Title :
Simple method for measuring dispersion and spectral absorption of Si wafers for use in MEMS applications
Author :
Nabil, M. ; Khalil, Diaa
Author_Institution :
Fac. of Eng., Ain Shams Univ., Cairo, Egypt
Abstract :
This paper describes a simple method for measuring the refractive index and absorption coefficient of silicon wafers in the Infrared (IR) wavelength range using a fiber probe. The proposed technique is applied in the wavelength range 1 to 1.7 microns. Results are compared to published models and a good agreement is obtained.
Keywords :
absorption coefficients; elemental semiconductors; micro-optomechanical devices; optical fibre dispersion; refractive index measurement; silicon; MEMS applications; Si; absorption coefficient; dispersion measurement; fiber probe; infrared wavelength range; refractive index; spectral absorption; Dispersion; beam splitter; optical MEMS; photonics; silicon;
Conference_Titel :
Electronics, Communications and Photonics Conference (SIECPC), 2011 Saudi International
Conference_Location :
Riyadh
Print_ISBN :
978-1-4577-0068-2
Electronic_ISBN :
978-1-4577-0067-5
DOI :
10.1109/SIECPC.2011.5876962
