DocumentCode
1612907
Title
Fabrication of silicon quarter wave plate at Terahertz frequency
Author
Saha, Shimul C. ; Ma, Yong ; Grant, James P. ; Khalid, A. ; Cumming, David R S
Author_Institution
Dept. of Electron. & Electr. Eng., Univ. of Glasgow, Glasgow, UK
fYear
2010
Firstpage
38
Lastpage
39
Abstract
We have developed anisotropically etched artificial dielectric quarter wave plates (QWPs) for use at 1.5 and 2.5 Terahertz. A SU8 anti-reflection coating is used to further improve the transmission coefficient by up to 12%.
Keywords
antireflection coatings; elemental semiconductors; etching; high-speed optical techniques; optical fabrication; silicon; terahertz waves; SU8 anti-reflection coating; anisotropically etched artificial dielectric quarter wave plates; frequency 1.5 THz; frequency 2.5 THz; transmission coefficient; Dielectric substrates; Etching; Fabrication; Frequency; Gratings; Optical imaging; Optical retarders; Scanning electron microscopy; Silicon; Tellurium;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Society Winter Topicals Meeting Series (WTM), 2010 IEEE
Conference_Location
Majorca
Print_ISBN
978-1-4244-5240-8
Electronic_ISBN
978-1-4244-5241-5
Type
conf
DOI
10.1109/PHOTWTM.2010.5421976
Filename
5421976
Link To Document