Title :
Piezoresistive torque sensor realized in thick film on tube technology
Author :
Hochstöger, H. ; Smetana, W. ; Homolka, H.
Author_Institution :
Inst. of Sensor & Actuator Systems/AEM-Group, Vienna Univ. of Technol.
Abstract :
Sensors for torsion or torque measurement are usually realized as metal strain gauges, inductive or capacitive sensors. Thick film technology has been proved as an alternative to the conventional sensor assembly. Application of thick film piezoresistors encompasses already a wide range of mechanical sensors, like sensors for measuring pressure, force, weight and acceleration. Thick film piezoresistors considered for torque sensor application have been applied on a glass ceramic coated steel tube. The tension- and compression-characteristics of the piezoresistors as a result of the applied torsion and their dependence on temperature have been determined. The structure, the performance characteristic and the long term stability of a torque sensor realized in thick film on tube technology are demonstrated
Keywords :
capacitive sensors; piezoresistive devices; strain gauges; thick film resistors; torque measurement; torsion; capacitive sensor; compression-characteristic; glass ceramic coated steel tube; inductive sensor; mechanical sensor; metal strain gauges; performance characteristic; piezoresistive torque sensor; tension-characteristic; thick film piezoresistor; thick film technology; torque measurement; torsion measurement; tube technology; Capacitive sensors; Force measurement; Mechanical sensors; Piezoresistance; Piezoresistive devices; Sensor phenomena and characterization; Strain measurement; Thick film sensors; Thick films; Torque measurement;
Conference_Titel :
Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005. 28th International Spring Seminar on
Conference_Location :
Wiener Neustadt
Print_ISBN :
0-7803-9325-2
DOI :
10.1109/ISSE.2005.1491060