Title :
Ellipsometry and thin films parameters measurement
Author :
Kalimanova, Ivanka ; Ilieva, Nevelina ; Georgieva, Margarita
Keywords :
Biomedical optical imaging; Ellipsometry; Measurement techniques; Optical films; Optical polarization; Optical reflection; Optical refraction; Optical sensors; Optical surface waves; Transistors;
Conference_Titel :
Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005. 28th International Spring Seminar on
Print_ISBN :
0-7803-9325-2
DOI :
10.1109/ISSE.2005.1491074
