Title :
VOC induced particle generation during wafer transportation and its solution
Author :
Okazaki, Motoya ; Niehoff, Sharon ; Alkurjy, Ninos ; Cai, Cathy ; Ngai, Chris ; Richtsteiger, Petra ; Bounouar, Julien
Author_Institution :
Appl. Mater., Inc., Santa Clara, CA, USA
Abstract :
In this paper, we describe a particle generation issue on 300 mm wafers during wafer shipping and transportation while using a FOSB (Front Opening Shipping Box) for the wafer shipping container. The analysis work associated with this defect generation issue and its prevention scheme will also be discussed.
Keywords :
containers; goods distribution; organic compounds; semiconductor materials; surface contamination; FOSB; VOC induced particle generation; front opening shipping box; volatile organic compounds; wafer shipping; wafer transportation; Adders; Air transportation; Atmospheric measurements; Pollution measurement; Semiconductor device measurement; Shape; FOSB; VOC; particles; transportation; wafer;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-6517-0
DOI :
10.1109/ASMC.2010.5551451
