All-Solid-State Pulsed Power Supply Based on Marx Generator

Author

Liu, Kefu ; Wu, Yifan ; Qiu, Jian

Author_Institution

Fudan Univ., Shanghai

fYear

2007

Firstpage

493

Lastpage

493

Abstract

Summary form only given. High voltage pulsed power supply with high repetitive rate has found wide applications in industry, and military such as plasma source for ion implantation, microwave generator and high pulsed power laser. The conventional pulsed power supply is limited by gas switch with short lifetime and low repetitive frequency. In recent years Marx generator based on solid state switches has proposed. It has dual functions by combining high repetitive rate from semiconductor switch with voltage adder from Marx generator principle. The solid state switches can be MOSFET , IGBT or SCR. This all-solid-state pulsed power supply has multifold advantages.

Keywords

MOSFET; insulated gate bipolar transistors; ion implantation; microwave generation; pulsed power supplies; IGBT; MOSFET; Marx generator; all-solid-state pulsed power supply; ion implantation; microwave generator; plasma source; pulsed power laser; solid state switches; Defense industry; Electricity supply industry; High power microwave generation; Optical pulse generation; Power generation; Power semiconductor switches; Pulse generation; Pulsed power supplies; Solid state circuits; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2007. ICOPS 2007. IEEE 34th International Conference on

Conference_Location

Albuquerque, NM

ISSN

0730-9244

Print_ISBN

978-1-4244-0915-0

Type

conf

DOI

10.1109/PPPS.2007.4345799

Filename

4345799