High-Resistivity Silicon Dielectric Ribbon Waveguide for Single-Mode Low-Loss Propagation at F/G-Bands

Author

Malekabadi, Ali ; Charlebois, Serge A. ; Deslandes, Dominic ; Boone, Francois

Author_Institution

Dept. de genie Electr. et de genie Inf., Univ. de Sherbrooke, Sherbrooke, QC, Canada

Volume

4

Issue

4

fYear

2014

fDate

Jul-14

Firstpage

447

Lastpage

453

Abstract

In this paper, dielectric ribbon waveguides (DRWs) are designed and characterized to work in the F (90-140 GHz) and G (140-220 GHz) frequency bands. High resistivity silicon (HR-silicon) due to its high transparency in these bands, and its low-cost fabrication process, were selected for the fabrication of these waveguides. The guided modes of DRW are studied using Marcatili and multi-line methods. A design procedure for optimal single-mode propagation was introduced. The wave attenuation inside the waveguide is discussed. Our experiments show that HR-silicon DRW has less than 0.087 dB/cm (0.01 cm^-1) of loss over the guiding bandwidth. The designed DRWs were realized using microfabrication techniques. The measurements are in very good agreement with theoretical predictions.

Keywords

dielectric waveguides; elemental semiconductors; microfabrication; millimetre wave propagation; silicon; F frequency band; G frequency band; Marcatili methods; Si; dielectric ribbon waveguide; frequency 90 GHz to 220 GHz; microfabrication techniques; multi-line methods; single-mode low-loss propagation; Attenuation; Dielectric losses; Optical waveguides; Propagation constant; Rectangular waveguides; Dielectric ribbon waveguide (DRW); Marcatili method; high resistivity silicon; loss; multi-line method; propagation constant measurement;

fLanguage

English

Journal_Title

Terahertz Science and Technology, IEEE Transactions on

Publisher

ieee

ISSN

2156-342X

Type

jour

DOI

10.1109/TTHZ.2014.2322513

Filename

6819471