DocumentCode :
163135
Title :
Process parameter calibration for millimeter-wave CMOS back-end device design with electromagnetic field analysis
Author :
Amakawa, Shuhei ; Orii, A. ; Katayama, Kengo ; Takano, Kyoya ; Motoyoshi, Mizuki ; Yoshida, Takafumi ; Fujishima, Minoru
Author_Institution :
Grad. Sch. of Adv. Sci. of Matter, Hiroshima Univ., Higashi-Hiroshima, Japan
fYear :
2014
fDate :
24-27 March 2014
Firstpage :
182
Lastpage :
187
Abstract :
This paper presents a systematic procedure for calibrating process parameters for electromagnetic field analysis. A few CMOS back-end material parameters are first chosen as fitting parameters by sensitivity analysis, and then their values are unambiguously determined from contour maps showing electrical characteristics versus effective material parameters. Calibration with measured data for 1-170 GHz is shown to give reasonably predictive simulation even at higher frequencies. Extraction of effective complex permittivities are also attempted up to 325 GHz in the presence of dummy metal fills for two filling patterns. The results indicate that the effective-parameter approach to dummy metal fills can reproduce measured propagation constants of transmission lines. The predictive power of such a simple approach is yet to be assessed.
Keywords :
CMOS analogue integrated circuits; calibration; electromagnetic fields; field effect MIMIC; transmission lines; CMOS back-end material parameters; contour maps; dummy metal fills; electrical characteristics; electromagnetic field analysis; filling patterns; frequency 1 GHz to 170 GHz; millimeter-wave CMOS back-end device; process parameter calibration; propagation constants; sensitivity analysis; systematic procedure; transmission lines; Calibration; Dielectrics; Frequency measurement; Materials; Metals; Power transmission lines; Transmission line measurements;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2014 International Conference on
Conference_Location :
Udine
ISSN :
1071-9032
Print_ISBN :
978-1-4799-2193-5
Type :
conf
DOI :
10.1109/ICMTS.2014.6841490
Filename :
6841490
Link To Document :
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