Title :
A surface micromachined capacitive pressure sensor for intraocular pressure measurement
Author :
Katuri, Kalyan C. ; Ramasubramanian, Melur K. ; Asrani, Sanjay
Author_Institution :
Dept. of Mech. & Aerosp. Eng., North Carolina State Univ., Raleigh, NC, USA
Abstract :
In glaucoma patients, intraocular pressure (IOP) is a parameter that plays significant role in disease diagnosis and treatment. Continuous IOP measurements could help capture fluctuations in IOP that are found to be relevant to disease progression. In this paper, an implantable surface micromachined capacitive pressure sensor that can be used as a part of LC tank implant circuit is discussed. A three layer Polysilicon process was used for sensor fabrication. A preliminary study on sensor coil is also presented.
Keywords :
bioMEMS; capacitive sensors; diseases; eye; patient diagnosis; pressure measurement; pressure sensors; prosthetics; LC tank implant circuit; continuous IOP measurement; disease diagnosis; glaucoma patient; implantable capacitive pressure sensor; intraocular pressure measurement; patient treatment; polysilicon process; sensor coil; sensor fabrication; surface micromachined capacitive pressure sensor; Antennas; Biomedical imaging; Biomedical monitoring; Driver circuits; Mechanical variables measurement; Monitoring; Silicon; capacitive sensor; glaucoma; intraocular pressure; wireless sensing;
Conference_Titel :
Mechatronics and Embedded Systems and Applications (MESA), 2010 IEEE/ASME International Conference on
Conference_Location :
Qingdao
Print_ISBN :
978-1-4244-7101-0
DOI :
10.1109/MESA.2010.5552077
