Title :
X-ray topography studies on the influence of the mass-loading effect on resonator parameters
Author :
Mateescu, Kina ; Capelle, Bernard ; Detaint, Jacques ; Dumitrache, Liviu
Author_Institution :
Nat. Inst. of Mater. Phys., Bucharest, Romania
fDate :
6/23/1905 12:00:00 AM
Abstract :
In this paper the results of electrical measurements of the mass-loading influence on AT-cut quartz resonator parameters are compared with those obtained by X-ray topography analysis of the same resonators. Based on the Ballato´s transmission-line analogs of the trapped-energy resonators vibrating in thickness-shear mode, the mass-loading effect on resonator characteristics was studied and the effective mass-loading, motional inductance and quality factor of quartz resonators were computed. X-ray topography measurements were performed by transmission diffraction using the synchrotron radiation. Sawyer plan-parallel polished AT quartz resonators with 14 mm diameter, 5 MHz frequency, Au electrodes with various structures, diameters and thickness were used in experiments. The results of the X-ray topography investigations are in agreement with the previous ones obtained by electrical measurements
Keywords :
Q-factor; X-ray topography; crystal resonators; electrodes; quartz; surface topography; 14 mm; 5 MHz; AT-cut quartz resonator parameters; Au electrodes; Au-SiO2; Sawyer plan-parallel polished resonators; X-ray topography analysis; bilayer electrodes; electrical measurements; mass-loading influence; motional inductance; multilayer electrodes; quality factor; synchrotron radiation; thickness-shear mode; transmission diffraction; transmission-line analogs; trapped-energy resonators; Electric variables measurement; Frequency; Gold; Inductance; Performance evaluation; Q factor; Surfaces; Synchrotron radiation; Transmission lines; X-ray diffraction;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-7028-7
DOI :
10.1109/FREQ.2001.956349
