DocumentCode :
1633224
Title :
Surface acoustic waves propagating on piezoelectric substrates under periodic arrays with large electrode thickness
Author :
Laude, V. ; Pastureaud, T. ; Ballandras, S.
Author_Institution :
Lab. de Phys. et de Metrologie des Oscillateurs, Univ. de Franche-Comte, Besancon
fYear :
2001
fDate :
6/23/1905 12:00:00 AM
Firstpage :
661
Lastpage :
665
Abstract :
It has been shown theoretically and demonstrated experimentally that shear horizontal (SH) surface waves can exist when the surface of an isotropic substrate is perturbed by a strong corrugation, for instance consisting of deep grooves etched in the substrate, whereas these waves cannot exist without this perturbation. It is shown in this paper that a periodic array of metallic electrodes (wires) exhibiting large aspect ratios deposited over a piezoelectric substrate gives rise to surface acoustic waves with general polarization. The admittance of an interdigital transducer (IDT), which is a basic tool for predicting the wave parameters, is calculated by a combination of finite element analysis and a boundary integral method. This approach has been extended to obtain the polarization of the acoustic waves. For different piezoelectric substrates, we predict various surface acoustic modes and their polarization. Along with mostly-SH modes we also find modes mostly polarized in the sagittal plane. We discuss the frequency behavior of the surface modes as a function of the electrode height compared to the period
Keywords :
arrays; boundary integral equations; electric admittance; electrodes; finite element analysis; interdigital transducers; periodic structures; polarisation; substrates; surface acoustic wave devices; surface acoustic waves; IDT admittance; SAW propagation; acoustic wave polarization; boundary integral method; corrugation; electrode height; electrode period; finite element analysis; frequency behavior; interdigital transducer; isotropic substrate; large aspect ratios; metallic electrodes; periodic array; piezoelectric substrate; sagittal plane; shear horizontal surface waves; surface acoustic modes; surface acoustic waves; Acoustic arrays; Acoustic propagation; Acoustic waves; Admittance; Corrugated surfaces; Electrodes; Etching; Piezoelectric polarization; Surface acoustic waves; Wires;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International
Conference_Location :
Seattle, WA
ISSN :
1075-6787
Print_ISBN :
0-7803-7028-7
Type :
conf
DOI :
10.1109/FREQ.2001.956359
Filename :
956359
Link To Document :
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