Title :
Holographic lithography for grating coupler fabrication in gallium nitride grown on sapphire substrate
Author :
Dylewicz, R. ; Patela, S. ; Paszkiewicz, R. ; Tlaczala, M. ; Bartkiewicz, S. ; Miniewicz, A.
Author_Institution :
Photonics Group, Wroclaw Univ. of Technol.
Abstract :
The paper reports on holographic lithography for fabrication of grating coupler in gallium nitride grown on sapphire substrate. The impact of the speckle effect is especially significant when further etching process is taken into consideration
Keywords :
III-V semiconductors; diffraction gratings; etching; gallium compounds; holography; optical couplers; optical fabrication; photolithography; sapphire; speckle; substrates; wide band gap semiconductors; Al2O3; GaN; etching; gallium nitride; grating coupler fabrication; holographic lithography; sapphire substrate; speckle effect; Fabrication; Gallium nitride; Gratings; Holography; III-V semiconductor materials; Lithography; Optical films; Photonics; Resists; Substrates;
Conference_Titel :
Photonics and Microsystems, 2005. Proceedings of 2005 International Students and Young Scientists Workshop
Conference_Location :
Dresden
Print_ISBN :
0-7803-9160-8
DOI :
10.1109/STYSW.2005.1617790
