Title :
Tools for non-invasive optical characterization of CMOS circuits
Author :
Stellari, Franco ; Zappa, F. ; Cova, S. ; Vendrame, L.
Author_Institution :
Dipt. di Elettronica e Inf., Politecnico di Milano, Italy
Abstract :
An optical non-invasive inspection technique is presented. This tool is able to probe the electrical waveforms propagating through ULSI circuits, by means of hot-carrier luminescence. From the experimental results and the luminescence characterization, we propose a SPICE model able to foresee MOSFET emission and bulk current during circuit simulation.
Keywords :
CMOS integrated circuits; SPICE; ULSI; electroluminescence; hot carriers; inspection; integrated circuit testing; CMOS ULSI circuit; MOSFET emission; SPICE model; bulk current; circuit simulation; electrical waveform; hot carrier luminescence; noninvasive optical inspection; Circuits; Hot carriers; Inspection; Luminescence; Optical propagation; Probes; SPICE; Semiconductor device modeling; Stimulated emission; Ultra large scale integration;
Conference_Titel :
Electron Devices Meeting, 1999. IEDM '99. Technical Digest. International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-5410-9
DOI :
10.1109/IEDM.1999.824199
