• DocumentCode
    164645
  • Title

    Elastic modulus and energy dissipation measurements with AFM on chalcogenide thin films

  • Author

    Bonyar, Attila ; Kaman, Judit ; Csarnovics, Istvan

  • Author_Institution
    Dept. of Electron. Technol., Budapest Univ. of Technol. & Econ., Budapest, Hungary
  • fYear
    2014
  • fDate
    23-26 Oct. 2014
  • Firstpage
    31
  • Lastpage
    34
  • Abstract
    Contact-mode point spectroscopy and tapping-mode imaging atomic force microscopy (AFM) techniques were used to measure the Young´s Modulus and tip-surface energy dissipation of amorphous chalcogenide thin films. As20Se80 thin film was prepared by thermal evaporation on glass substrates, and a He-Ne laser (633 nm) was used to prepare a holographic grating on the thin film. The results from both AFM measurement techniques indicate that there are significant differences between the peaks and valleys of the grating in terms of elasticity and tip-surface energy dissipation.
  • Keywords
    Young´s modulus; amorphous semiconductors; arsenic compounds; atomic force microscopy; elasticity; semiconductor thin films; vacuum deposition; AFM; As20Se80; Young´s modulus; amorphous chalcogenide thin films; contact-mode point spectroscopy; elastic modulus; elasticity; energy dissipation measurements; holographic grating; tapping-mode imaging atomic force microscopy; thermal evaporation; tip-surface energy dissipation; Energy dissipation; Energy measurement; Force; Gratings; Spectroscopy; Surface topography; Young´s modulus; AFM; Young´s Modulus; chalcogenide; energy dissipation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design and Technology in Electronic Packaging (SIITME), 2014 IEEE 20th International Symposium for
  • Conference_Location
    Bucharest
  • Type

    conf

  • DOI
    10.1109/SIITME.2014.6966988
  • Filename
    6966988