DocumentCode
1653530
Title
Graphene for VLSI: FET and interconnect applications
Author
Awano, Yuji
Author_Institution
Keio Univ., Hiyoshi, Japan
fYear
2009
Firstpage
1
Lastpage
4
Abstract
Because of their remarkable physical properties, graphene should be one of the most important Emerging Research Materials (ERM) for not only the front-end but also back-end devices of VLSIs for the next decade. In this paper, we discuss the present status of their material technologies and some issues to be addressed for realizing graphene channels and wiring devices for a future LSI.
Keywords
VLSI; field effect transistors; graphene; interconnections; C; FET; VLSI; back-end devices; emerging research materials; graphene channels; interconnect applications; material technologies; wiring devices; CMOS technology; FETs; Fabrication; III-V semiconductor materials; Integrated circuit interconnections; Large scale integration; Materials science and technology; Organic materials; Temperature; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting (IEDM), 2009 IEEE International
Conference_Location
Baltimore, MD
Print_ISBN
978-1-4244-5639-0
Electronic_ISBN
978-1-4244-5640-6
Type
conf
DOI
10.1109/IEDM.2009.5424381
Filename
5424381
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