Title :
Electrically-induced thermal stimuli forMEMS testing
Author :
Dumas, N. ; Azais, F. ; Latorre, L. ; Nouet, P.
Author_Institution :
Universite de Montpellier II
Keywords :
CMOS process; Costs; Electrical fault detection; Manufacturing; Micromachining; Micromechanical devices; Silicon; System testing; Temperature; Wet etching;
Conference_Titel :
Test Symposium, 2004. ETS 2004. Proceedings. Ninth IEEE European
Print_ISBN :
0-7695-2119-3
DOI :
10.1109/ETSYM.2004.1347605
