Title :
Mems built-in-self-test using MLS
Author :
Dhayni, A. ; Mir, S. ; Rufer, L.
Author_Institution :
TIMA Laboratory
Keywords :
Coupling circuits; Electrothermal effects; Micromechanical devices; Microstructure; Multilevel systems; System testing; Thermal conductivity; Thermal force; Thermal resistance; Thermomechanical processes;
Conference_Titel :
Test Symposium, 2004. ETS 2004. Proceedings. Ninth IEEE European
Print_ISBN :
0-7695-2119-3
DOI :
10.1109/ETSYM.2004.1347607
