Title :
Study on Fabrication of Polymer Electrostatic Comb-drive Actuator by DXRL Technique
Author :
Li, Shipeng ; Li, Yigui ; Pham, Phuc Hong ; Dao, Dzung Viet ; Sugiyama, Susumu
Author_Institution :
Dept. of Microsyst. Technol., Ritsumeikan Univ., Kusatsu
Abstract :
This paper reports a novel approach to fabricate poly-methyl-meth-acrylate (PMMA) electrostatic comb-drive actuator using the deep X-ray lithography (DXRL) technique. The designed actuator consists of 140 units of interdigitated parallel capacitors with the finger gap and width being 2mum and 4mum respectively, and the thickness of the structure is 200 mum, which makes the aspect ratio 50:1. A brief description of the design and simulation with ANSYS are also presented in this paper
Keywords :
X-ray lithography; electrostatic actuators; polymers; ANSYS; deep X-ray lithography; poly-methyl-meth-acrylate electrostatic comb-drive actuator fabrication; polymer electrostatic comb-drive actuator; Electrostatic actuators; Fabrication; Fingers; Micromechanical devices; Polymers; Shape; Solid modeling; Stators; Voltage; X-ray lithography;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2006 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
1-4244-0717-6
Electronic_ISBN :
1-4244-0718-1
DOI :
10.1109/MHS.2006.320326
