• DocumentCode
    1655121
  • Title

    Backend monolithic integration of passive optical devices on 90nm bulk CMOS chip

  • Author

    Lee, Yoon Ho Daniel ; Lipson, Michal

  • Author_Institution
    Cornell Nanophotonics Group, Cornell Univ., Ithaca, NY, USA
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate optical resonators and waveguides monolithically integrated on a CMOS die through post-backend processing. Both CMOS process integrity and optical performance are verified and measured.
  • Keywords
    CMOS integrated circuits; integrated optoelectronics; optical resonators; optical waveguides; CMOS die; CMOS process integrity; backend monolithic integration; bulk CMOS chip; optical resonators; optical waveguides; passive optical devices; post-backend processing; size 90 nm; CMOS integrated circuits; Electrical resistance measurement; Optical waveguides; Photonics; Semiconductor device measurement; Silicon; Temperature measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6325716
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1655121