Title :
3-D integration of silicon nitride on silicon-on-insulator platform
Author :
Li, Qing ; Eftekhar, Ali A. ; Atabaki, Amir H. ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We propose a new material platform using vertical integration of silicon nitride on silicon-on-insulator for optimizing device performances in silicon photonics. Preliminary results including silicon nitride growth, high-Q resonator fabrication, and vertical integration are presented.
Keywords :
Q-factor; integrated optics; optical fabrication; optical materials; optical resonators; silicon compounds; silicon-on-insulator; 3-D integration; SiN-Si; high-Q resonator fabrication; integrated photonic circuits; silicon nitride growth; silicon photonics; silicon-on-insulator; vertical integration; Absorption; Annealing; Couplings; Optical resonators; Silicon; Silicon compounds;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
