Title :
Three-dimensional Microstructuring of PDMS by Two-photon Microstereolithography
Author :
Hasegawa, Takuya ; Oishi, Kosuke ; Maruo, Shoji
Author_Institution :
Dept. of Mech. Eng., Yokohama Nat. Univ.
Abstract :
We have developed a photocurable PDMS resin for making three-dimensional (3-D) PDMS-based micro structures via two-photon microstereolithography. Several 3-D micro structures such as alphabetical letters and microrotors were fabricated using femtosecond laser direct writing. Freely movable micro structures were also fabricated using the direct writing process. In addition, a microrotor was rotated by optical trapping. Finally, a movable microrotor was built into a microchannel and driven by light. Movable PMDS micromachines such as these have potential for application to microfluidic devices and as micromanipulation tools for biological applications
Keywords :
lithography; micromechanical devices; 3D microstructure; femtosecond laser direct writing; microchannel; microfluidic device; micromachine; micromanipulation tool; microrotor; optical trapping; poly dimethylsiloxane resin; two-photon microstereolithography; Biomedical optical imaging; Electromagnetic wave absorption; Glass; Laser beams; Microchannel; Microstructure; Optical mixing; Resins; Ultrafast optics; Writing;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2006 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
1-4244-0717-6
Electronic_ISBN :
1-4244-0718-1
DOI :
10.1109/MHS.2006.320261
