DocumentCode :
1656921
Title :
Dynamic aging of CMOS SOI transistors in circuit operation
Author :
Guichard, E. ; Reimbold, G. ; Cristoloveanu, S. ; Leroux, C. ; Blachier, D. ; Borel, G. ; Giffard, B.
Author_Institution :
CEA, Centre d´´Etudes Nucleaires de Grenoble, France
fYear :
1995
Firstpage :
647
Lastpage :
650
Abstract :
SOI transistors, operating in dynamic mode, have been fully investigated using dedicated test circuits. Indeed, specific circuits have been built in order to make, in-situ monitoring of electrical characteristics of n- and p-MOSFETs. We have demonstrated that physical mechanisms of the degradation, in partially depleted SOI devices, are comparable after static and dynamic stress. Indeed, back interface degradation analysis has revealed that, even after dynamic aging, p-MOSFETs are submitted to electron trapping while it is not the case for n-MOSFETs. The “quasi static” approach is not applicable in inverter-type circuit, and could be explained by successive injection of holes and electrons due to the specific bias waveform, leading to an enhancement of the degradation
Keywords :
MOSFET; ageing; electron traps; hot carriers; semiconductor device reliability; semiconductor device testing; silicon-on-insulator; CMOS SOI transistors; back interface degradation analysis; circuit operation; dedicated test circuits; dynamic aging; dynamic mode; electrical characteristics; electron trapping; in-situ monitoring; inverter-type circuit; partially depleted SOI devices; specific bias waveform; Aging; Capacitance; Circuit testing; Degradation; Electric variables; Electrons; Frequency; MOSFET circuits; Ring oscillators; Stress;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 1995. IEDM '95., International
Conference_Location :
Washington, DC
ISSN :
0163-1918
Print_ISBN :
0-7803-2700-4
Type :
conf
DOI :
10.1109/IEDM.1995.499303
Filename :
499303
Link To Document :
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