Harmonic detection of resonance method

Electromechanical resonators in the micro (MEMS) and nano (NEMS) regimes have emerged as promising tools for use in diverse applications such as ultrasensitive physical, chemical, and biological sensors, with detection limits as low as a single molecule. The advent of state-of-the-art micro-fabrication techniques has enabled a high throughput platform for commercialization. However, the sensitivity and reliability of such devices are highly dependent on the employed detection technique. We present a highly useful yet simple electrical detection scheme: the Harmonic Detection of Resonance (HDR) method. The prominent HDR features will be discussed and applications ranging from the use of micro-cantilevers as sensors to probing mechanical properties in nano-cantilever systems will be presented.