An analysis of the in-plane acceleration sensitivity of ST-cut quartz surface wave resonators with the substrate extending beyond the supports

For this support configuration a small amount of flexure occurs in the active substrate for the case of in-plane acceleration, so the dominant extensional biasing state is found first and used to define conservatively the flexural biasing state. The calculated results show that very low (less than a few parts in 10¹¹) in-plane acceleration sensitivities can be obtained, and since the normal acceleration sensitivity can readily be made to vanish, very low resultant acceleration sensitivities can be achieved with this support configuration