• DocumentCode
    1660488
  • Title

    A large gap of Ar and mixed gas at atmospheric pressure RF-DBD glow discharges

  • Author

    Li, B. ; Chen, Q. ; Liu, Z. ; Wang, Z.

  • Author_Institution
    Lab. of Plasma Phys. & Mater., Beijing Inst. of Graphic Commun., Beijing, China
  • fYear
    2010
  • Firstpage
    232
  • Lastpage
    233
  • Abstract
    In this study, a large gap of the distance between electrodes (>5.5 mm) of Ar atmospheric pressure glow discharge (APGD) in radio frequency dielectric barrier discharges (RF-DBD) is achieved. The I-V characteristic and I-phase angle characteristic of RF-DBD are studied in detail. The discharge characteristic of Ar mixed with N2, O2 and air, respectively, was diagnosed by the optical emission spectrum. The Lissajous plot was measured to calculate the effective power of the discharges. It is obtained that the mixture gas ratio in RF-DBD is seriously affected the discharge stability and the discharge mode. It concludes that this adjustable manufacture of the RF-DBD is capable in wide applications for material modifications and polymerizations.
  • Keywords
    argon; electrodes; gas mixtures; glow discharges; high-frequency discharges; nitrogen; oxygen; plasma diagnostics; plasma instability; Ar; Ar-N2; Ar-O2; I-V characteristic; I-phase angle characteristic; Lissajous plot; atmospheric pressure glow discharge; discharge characteristic; discharge mode; discharge stability; effective power; electrodes; mixed gas; mixture gas ratio; optical emission spectrum; polymerizations; pressure 1 atm; radiofrequency dielectric barrier discharges; Argon; Dielectrics; Electrodes; Glow discharges; Manufacturing; Polymers; Power measurement; Radio frequency; Stability; Stimulated emission;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanoelectronics Conference (INEC), 2010 3rd International
  • Conference_Location
    Hong Kong
  • Print_ISBN
    978-1-4244-3543-2
  • Electronic_ISBN
    978-1-4244-3544-9
  • Type

    conf

  • DOI
    10.1109/INEC.2010.5424652
  • Filename
    5424652