Title :
A large gap of Ar and mixed gas at atmospheric pressure RF-DBD glow discharges
Author :
Li, B. ; Chen, Q. ; Liu, Z. ; Wang, Z.
Author_Institution :
Lab. of Plasma Phys. & Mater., Beijing Inst. of Graphic Commun., Beijing, China
Abstract :
In this study, a large gap of the distance between electrodes (>5.5 mm) of Ar atmospheric pressure glow discharge (APGD) in radio frequency dielectric barrier discharges (RF-DBD) is achieved. The I-V characteristic and I-phase angle characteristic of RF-DBD are studied in detail. The discharge characteristic of Ar mixed with N2, O2 and air, respectively, was diagnosed by the optical emission spectrum. The Lissajous plot was measured to calculate the effective power of the discharges. It is obtained that the mixture gas ratio in RF-DBD is seriously affected the discharge stability and the discharge mode. It concludes that this adjustable manufacture of the RF-DBD is capable in wide applications for material modifications and polymerizations.
Keywords :
argon; electrodes; gas mixtures; glow discharges; high-frequency discharges; nitrogen; oxygen; plasma diagnostics; plasma instability; Ar; Ar-N2; Ar-O2; I-V characteristic; I-phase angle characteristic; Lissajous plot; atmospheric pressure glow discharge; discharge characteristic; discharge mode; discharge stability; effective power; electrodes; mixed gas; mixture gas ratio; optical emission spectrum; polymerizations; pressure 1 atm; radiofrequency dielectric barrier discharges; Argon; Dielectrics; Electrodes; Glow discharges; Manufacturing; Polymers; Power measurement; Radio frequency; Stability; Stimulated emission;
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
DOI :
10.1109/INEC.2010.5424652
