• DocumentCode
    1662389
  • Title

    Ultra-high-Q microcavities fabricated on fused silica chips by three-dimensional femtosecond laser microfabrication

  • Author

    Lin, J. ; Fang, W. ; Cheng, Y. ; Yu, S.J. ; Ma, Y.G. ; He, F. ; Qiao, L. ; Tong, L. ; Xu, Z.

  • Author_Institution
    State Key Lab. of High Field Laser Phys., Shanghai, China
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report on fabrication of ultra-high-Q (~106) whispering gallery microcavities on a fused silica chip using a femtosecond laser, enabled by the high spatial resolution and three-dimensional nature of femtosecond laser direct writing.
  • Keywords
    Q-factor; high-speed optical techniques; integrated optics; laser materials processing; microcavities; microfabrication; optical fabrication; silicon compounds; whispering gallery modes; SiO2; femtosecond laser direct writing; fused silica chips; spatial resolution; three-dimensional femtosecond laser microfabrication; ultrahigh-Q whispering gallery microcavities; Measurement by laser beam; Microcavities; Optical device fabrication; Silicon compounds; Surface emitting lasers; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6325981