DocumentCode
1663901
Title
Silicon-on-insulator integrated optical biosensors for environmental monitoring
Author
Newman, Jeffrey D. ; Turner, Anthony P F ; Rickman, Andrew G. ; Harpin, Arnold P R ; Shaw, Matthew P. ; McKenzie, James S.
Author_Institution
Biotechnology Centre, Cranfield Univ., UK
fYear
1995
fDate
11/15/1995 12:00:00 AM
Firstpage
42430
Lastpage
42435
Abstract
It is shown that the fabrication of a family of silicon based evanescent optical field sensors can be produced using well established silicon microelectronics processes. Such devices offer advantages of low cost and high sensitivity compared with conventional technologies. A further cost advantage arises from the generic nature of the technology. This is largely due to the active features of silicon circuits. New sensors will only require the development of appropriate receptor layers. Ink-jet printing provides the means to produce highly controlled droplets of very low volume. These can be printed at high speed and are controlled by a microprocessor. It is therefore possible to produce small receptor film regions
Keywords
biosensors; chemical sensors; elemental semiconductors; integrated optics; light interferometers; optical waveguides; pollution measurement; printing; silicon-on-insulator; ASOC technology; SOI integrated optical biosensors; Si-SiO2; active integrated optic circuits; active interferometer incorporation; elemental semiconductor; environmental monitoring; evanescent optical field sensors; fabrication; high sensitivity; highly controlled droplets; immunosensors; ink-jet printing; low cost; microprocessor control; nonspecific binding; optimum waveguide structure; receptor layers; small receptor film regions;
fLanguage
English
Publisher
iet
Conference_Titel
Optical Techniques for Environmental Monitoring, IEE Colloquium on
Conference_Location
London
Type
conf
DOI
10.1049/ic:19951117
Filename
499571
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