مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

1664001

Title :

ASMC 94 Invited Speakers

fYear :

1994

Firstpage :

323

Lastpage :

334

Keywords :

Books; Cleaning; Constraint theory; Contamination; Instruments; Manufacturing; Metrology; Microelectronics; Physics; Semiconductor device manufacture;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Advanced Semiconductor Manufacturing Conference and Workshop. 1994 IEEE/SEMI

Print_ISBN :

0-7803-2053-0

Type :

conf

DOI :

10.1109/ASMC.1994.588290

Filename :

588290

Link To Document :

https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1664001