DocumentCode
1665161
Title
Presheaths in multi-dipole plasma
Author
Hala, A.R. ; Hershkowitz, Noah
Author_Institution
Wisconsin Univ., Madison, WI, USA
fYear
1998
Firstpage
307
Lastpage
308
Abstract
Summary form only given. Measurements of plasma presheath thickness as a function of pressure (0.5 to 2 mTorr) were made in a DC hot-filament produced multi-dipole plasma discharge. The presheath plasma potential near a negatively biased plate (D=10 cm) was mapped with an emissive probe. The inflection point method in the limit of zero emission was used. The probe measurement of the plasma potential were accurate to approximately 0.1 V. Measurements were made in plasmas based on nitrogen, argon and combinations of both gases. Experimental results were similar to those found in ECR magnetized plasmas. The presheaths were found to be regions of approximately constant electric field with characteristic lengths the order of the ion-neutral collision lengths. The results show contraction of the presheath as the pressure increased. Two competing processes affect the presheath. These are ionization and collisions with ionization becoming more important at lower pressures. Experimental results are compared to various presheath models.
Keywords
plasma diagnostics; plasma pressure; plasma sheaths; 0.5 to 2.0 mtorr; DC hot-filament produced multi-dipole plasma discharge; ECR magnetized plasmas; characteristic lengths; contraction; electric field; emissive probe; inflection point method; ion+neutral collision lengths; ionization; multidipole plasma; negatively biased plate; plasma collisions; plasma potential; plasma presheath thickness measurement; plasma pressure dependence; presheath plasma potential; Argon; Gases; Ionization; Magnetic field measurement; Nitrogen; Plasma measurements; Plasma properties; Pressure measurement; Probes; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
Conference_Location
Raleigh, NC, USA
ISSN
0730-9244
Print_ISBN
0-7803-4792-7
Type
conf
DOI
10.1109/PLASMA.1998.677922
Filename
677922
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