Title :
Detection of vacuum level inside sealed field emission displays by infra red spectroscopy
Author :
Chen, Y.H. ; Lin, W.Y. ; Tseng, C.C. ; Su, Gi D.
Author_Institution :
Electron. Res. & Service Organ., Ind. Technol. Res. Inst., Hsinchu, Taiwan
Abstract :
In this paper, we report the non-dispersive infrared (IR) for detecting the vacuum level inside carbon-nanotube field-emission displays (CNT-FED). Many gas molecules, such as moisture, can be detected by using infrared absorption characteristics. Through the knowing concentration of the targeted gas from the IR absorption, the pressure of the gas inside the vacuum-sealed FED panels can be calculated by ideal gas law. Measurement based on this principle offer advantages including low cross talk and high sensitivity. The calculated detection limit for the carbon dioxide (CO2) is down to 2×10-6 torr with 5 cm optical path.
Keywords :
carbon nanotubes; field emission displays; infrared spectra; vacuum measurement; 2E-6 torr; 5 nm; C; CO2; carbon-nanotube field-emission displays; cross talk; detection limit; ideal gas law; infra red spectroscopy; infrared absorption characteristics; nondispersive infrared; optical path; sealed field emission displays; sensitivity; vacuum level detection; Electromagnetic wave absorption; Flat panel displays; Infrared detectors; Infrared spectra; Liquid crystal displays; Optical pumping; Optical sensors; Pollution measurement; Spectroscopy; Wavelength measurement; carbon nano tube (CNT); field emission displays (FED); non-dispersive infrared sensing; vacuum sealing;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619619
