Title :
Field emitter with focusing column for atomic resolution storage device
Author :
Govyadinov, Alex ; Smith, Jim ; Mackie, Bill ; Charbonier, Francis ; Benning, Paul
Author_Institution :
Hewlett-Packard Co., Corvallis, OR, USA
Abstract :
This paper discussed the design and development and fabrication of a focusable electron emitter for atomic resolution storage. The system design includes an electron source with an integrated focusing column and must provide a minimum spot size and maximum efficiency under optimum conditions. Experimental results from the fabricated parts compared well with model spot size predictions.
Keywords :
electron field emission; electron sources; integrated optics; optical fabrication; atomic resolution storage device; electron source; field emitter; focusable electron emitter; focusing column; spot size; Apertures; Dielectrics; Electron beams; Fabrication; Focusing; Lenses; Optical design; Physics; Semiconductor device measurement; Writing;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619622
