From 2D to 3D FEM simulations of a CMOS MEMS convective accelerometer

Author

Mezghani, B. ; Brahim, A. ; Tounsi, F. ; Masmoudi, M. ; Rekik, A.A. ; Nouet, P.

Author_Institution

Nat. Eng. Sch. of Sfax, Univ. of Sfax, Sfax, Tunisia

fYear

2011

Firstpage

1

Lastpage

5

Abstract

In this paper, we present 3D FEM simulations of a CMOS MEMS convective accelerometer. Differences between 3D and previously published 2D simulations are also discussed. We describe sensor architecture and we present a sensor model that is used for 3D FEM simulations. The prototype has a heater-cavity border distance of 350μm. We show the details of the sensitivity evaluation along the sensitive axis. It is found that the maximum sensitivity location is at a distance of 125μm from the heater center. So, the detector should be placed closer to the heater than the mid distance. It is shown that this is closely related to the smaller size of isotherms obtained in 3D simulations.

Keywords

CMOS integrated circuits; accelerometers; finite element analysis; microsensors; sensitivity; 2D FEM simulations; 3D FEM simulations; CMOS MEMS convective accelerometer; distance 125 mum; distance 350 mum; heater-cavity border distance; isotherms; maximum sensitivity location; sensitivity evaluation; sensor architecture; sensor model; Accelerometers; Detectors; Heating; Sensitivity; Solid modeling; Temperature sensors; Three dimensional displays; CMOS; Convective accelerometer; FEM simulation; MEMS;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics (ICM), 2011 International Conference on

Conference_Location

Hammamet

Print_ISBN

978-1-4577-2207-3

Type

conf

DOI

10.1109/ICM.2011.6177384

Filename

6177384