DocumentCode
1671965
Title
Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy
Author
Chu, C.L. ; Ji, H.L. ; Guo, C. ; Sheng, X.B. ; Dong, Y.S. ; Lin, P.H. ; Hu, T. ; Chu, P.K.
Author_Institution
Jiangsu Key Lab. for Adv. Metallic Mater., Southeast Univ., Nanjing, China
fYear
2010
Firstpage
985
Lastpage
986
Abstract
Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the electropolished NiTi SMA.
Keywords
deformation; nanoindentation; nickel alloys; sputter deposition; thin films; titanium alloys; zirconium compounds; NiTi; ZrCN; magnetron sputtering; nanoindentation; shape memory alloy; surface deformation; surface nanomechanical properties; thin films; Inorganic materials; Laboratories; Magnetic materials; Materials science and technology; Mechanical factors; Microstructure; Physics; Shape memory alloys; Sputtering; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location
Hong Kong
Print_ISBN
978-1-4244-3543-2
Electronic_ISBN
978-1-4244-3544-9
Type
conf
DOI
10.1109/INEC.2010.5425083
Filename
5425083
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