DocumentCode
1673014
Title
A 3 GHZ, 144 point probe future for automatic IC wafer testing
Author
Hamling, Daniel T.
fYear
1995
Firstpage
940
Abstract
A probe fixture for manufacturing has been developed that addresses the need for high speed automatic wafer testing of medium to high pad count ICs. The probe fixture enhibits a bandwidth of 3.2 GHz and a maximum probe count of 144 as well as other useful capabilities. The probe fixture and test system description, perfomance capabilities, and practical demonstration are discussed.
Keywords
Automatic testing; Bandwidth; Circuit testing; Clamps; Fixtures; High speed integrated circuits; Integrated circuit testing; Manufacturing automation; Probes; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Conference, 1992. Proceedings., International
Conference_Location
Baltimore, MD
ISSN
1089-3539
Print_ISBN
0-7803-0760-7
Type
conf
DOI
10.1109/TEST.1992.527921
Filename
527921
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