DocumentCode
1673053
Title
Modeling The Electromagnetic Fields And The Plasma Excitation In Moderate Pressure Microwave Cavity Plasma Sources
Author
Tan, Wei ; Grotjohn, Timothy A.
Author_Institution
Midugan State University
fYear
1994
Firstpage
77
Lastpage
77
Keywords
Electromagnetic fields; Electromagnetic modeling; Plasma applications; Plasma density; Plasma materials processing; Plasma measurements; Plasma properties; Plasma simulation; Plasma sources; Plasma transport processes;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.588685
Filename
588685
Link To Document