High Q microwave acoustic resonators and filters

Author

Lakin, K.M. ; Kline, G.R. ; McCarron, K.T.

Author_Institution

TFR Technol. Inc., Redmond, OR, USA

fYear

1993

Firstpage

1517

Abstract

The authors present recent experimental and modeling results for high-Q microwave acoustic resonators and filters for use in oscillators and other frequency control applications. Overmoded resonators have exhibited an FQ product greater than 1*10/sup 14/ Hz (e.g. Q=68000 at 1.6 GHz) with a strong inductive response suitable for one-port and two-port oscillator feedback circuits. Ladder filters fabricated with overmoded resonators have loaded Qs greater than 40000 with 76-kHz bandwidth at 1.6 GHz. Aluminum nitride films were used for transduction on Z-cut sapphire substrates.<>

Keywords

Q-factor; acoustic microwave devices; crystal filters; crystal resonators; microwave filters; passive filters; 1.6 GHz; 76 kHz; Al/sub 2/O/sub 3/; AlN films; UHF; Z-cut sapphire substrates; feedback circuits; frequency control applications; high-Q; inductive response; microwave acoustic resonators; modeling; one part oscillators; oscillators; overmoded resonators; two-port oscillator; Bandwidth; Electrodes; Microwave devices; Microwave filters; Microwave oscillators; Piezoelectric films; Resonant frequency; Resonator filters; Semiconductor thin films; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1993., IEEE MTT-S International

Conference_Location

Atlanta, GA, USA

ISSN

0149-645X

Print_ISBN

0-7803-1209-0

Type

conf

DOI

10.1109/MWSYM.1993.276852

Filename

276852