Title :
The future is MEMS design considerations of microelectromechanical systems at Bosch
Author :
Schwarz, Mike ; Franz, Jochen ; Reimann, Mathias
Author_Institution :
Bus. Unit Automotive Electron., Robert Bosch GmbH, Reutlingen, Germany
Abstract :
The Robert Bosch GmbH is the world´s largest supplier of micromechanical sensors in automotive and consumer applications. Achieving a high quality and cost effectiveness in automotive and consumer applications an advanced design flow is required to fulfill these criteria. In here a method and algorithm is presented to ensure a high functionality and yields of micromechanical sensors.
Keywords :
automotive electronics; microsensors; MEMS design; Robert Bosch GmbH; automotive applications; consumer applications; microelectromechanical systems; micromechanical sensors; Analytical models; Automotive engineering; Mathematical model; Monte Carlo methods; Sensor phenomena and characterization; Silicon; MEMS; automotive applications; consumer applications; design methodology; micromechnical sensors;
Conference_Titel :
Mixed Design of Integrated Circuits & Systems (MIXDES), 2015 22nd International Conference
Conference_Location :
Torun
Print_ISBN :
978-8-3635-7806-0
DOI :
10.1109/MIXDES.2015.7208506
