DocumentCode
169330
Title
Integrated system for consumable yield analysis
Author
Zhuqing Zong ; Nehring, Ute
Author_Institution
GLOBALFOUNDRIES, Dresden, Germany
fYear
2014
fDate
19-21 May 2014
Firstpage
334
Lastpage
340
Abstract
This paper will give an overview on the approach to provide an integrated system for consumable yield analysis at GLOBALFOUNDIRES to support rapid new product ramp, technology development and yield excursion analysis. The business drivers for such a system will be reviewed, and insight will be given into the integration components, software architecture, challenges, and the implemented and proposed solutions. The paper will conclude with a discussion of yield analysis approaches using the system.
Keywords
integrated circuit yield; semiconductor industry; GLOBALFOUNDIRES; business drivers; consumable yield analysis; integrated system; rapid new product ramp; technology development; yield analysis approaches; yield excursion analysis; Business; Chemicals; Data mining; Data warehouses; Databases; Resists; Slurries; consumable yield analysis; data management;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI
Conference_Location
Saratoga Springs, NY
Type
conf
DOI
10.1109/ASMC.2014.6846950
Filename
6846950
Link To Document