DocumentCode
1695845
Title
Transport Of Dust Particles In Inductively Coupled Discharges
Author
Hwang, H.H. ; Ventzek, P.L.G. ; Hoekstra, R. ; Kusbner, M.J.
Author_Institution
University Of Illinois
fYear
1994
Firstpage
217
Lastpage
217
Keywords
Dusty plasma; Electrodes; Electrostatics; Inductors; Plasma applications; Plasma density; Plasma devices; Plasma materials processing; Plasma sources; Plasma temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.589127
Filename
589127
Link To Document