Micromechanical triaxial acceleration sensor for automotive applications

Author

Reichenbach, R. ; Schubert, D. ; Gerlach, G.

Author_Institution

Sensor-Technol.-Centre, Robert Bosch GmbH, Reutlingen, Germany

Volume

1

fYear

2003

Firstpage

77

Abstract

A micromechanical triaxial acceleration sensor for automotive applications has been realised that has all three axis integrated into one single transducer element. Prototypes of the sensor were fabricated using a standard Bosch surface micromachining process. The active electromechanical transducer element requires less than 1 mm/sup 2/ of chip area. Open-loop capacitive readout is used to evaluate the sensor, which operates in a three-mass-oscillator configuration. X, Y and Z-axis sensitivities of 0.55 fF/G, 0.4 fF/G and 0.99 fF/G have been achieved.

Keywords

accelerometers; capacitive sensors; micromachining; microsensors; automotive applications; electromechanical transducer; micromechanical triaxial acceleration sensor; single transducer; standard Bosch surface micromachining; Acceleration; Accelerometers; Automotive applications; Automotive electronics; Capacitive sensors; Capacitors; Electrodes; Micromechanical devices; Springs; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1215257

Filename

1215257