Title :
Noise analysis and characterization of a sigma-delta capacitive silicon microaccelerometer
Author :
Kulah, H. ; Junseok Chae ; Najafi, K.
Author_Institution :
Center for Wireless Integrated Microsyst., Michigan Univ., Ann Arbor, MI, USA
Abstract :
This paper reports a high-sensitivity low-noise capacitive accelerometer system with one micro-g//spl radic/Hz resolution. The system operates as a 2/sup nd/-order electromechanical /spl Sigma/-/spl Delta/ modulator together with the interface electronics. A detailed noise analysis of electromechanical /spl Sigma/-/spl Delta/ capacitive accelerometers with a final goal of achieving sub-/spl mu/g resolution is also presented. The circuit has more than 120 dB dynamic range and can resolve better than 10 aF. The complete module operates from a single 5V supply and has a measured sensitivity of 960 mV/g with a noise floor of 1.08 /spl mu/g//spl radic/Hz in open-loop. This system can resolve better than 10 /spl mu/g//spl radic/Hz in closed-loop.
Keywords :
accelerometers; capacitors; elemental semiconductors; microsensors; semiconductor device noise; silicon; 120 dB; 5 V; Si; interface electronics; microresolution; noise analysis; second order electromechanical modulator; sensitivity; sigma delta capacitive silicon microaccelerometer; 1f noise; Accelerometers; Capacitive sensors; Circuit noise; Delta-sigma modulation; Dynamic range; Electrodes; Parasitic capacitance; Silicon; Working environment noise;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215261
