Vertically supported microresonators

Vertically supported, comb-shape microresonators with the feasibility of actuation in two perpendicular directions have been demonstrated. The microstructure is made of 2-/spl mu/m thick polysilicon by a standard surface micromachining process and is vertically lifted and fixed with the assistance of locking springs and micro hinges. With DC bias voltage of 10V and AC driving voltage of 10V, peak-to-peak, under atmospheric pressure, the resonator vibrates in parallel to the comb finger direction at 7.75 kHz with measured amplitude of 3.3 /spl mu/m and quality factor of 67. When actuated in the direction normal to the surface of comb finger, the resonator vibrates at 2 kHz with vibration amplitudes of 11.2 /spl mu/m and 10.5 /spl mu/m, respectively for the two opposite, comb-shape microstructures. The potential applications of these vertically supported microresonators are in the areas of MOEMS (Micro-opto-electro-mechanical Systems) devices such as optical systems on a chip.