Title :
Hardness detection using a micromachined active tactile sensor
Author :
Hasegawa, Y. ; Shimizu, T. ; Miyaji, T. ; Shikida, M. ; Sasaki, H. ; Sato, K. ; Itoigawa, K.
Author_Institution :
Dept. of Micro Syst. Eng., Nagoya Univ., Japan
Abstract :
We developed a new type of micromachined tactile sensor that detects both the contact force and hardness of an object. It consists of a diaphragm with a mesa structure, a piezo-resistive strain sensor on the diaphragm, and a chamber for pneumatic actuation. We theoretically designed the device specifications to detect humanfinger touch. We developed the fabrication process of the device using micromachining technology. The sensor element measures 6.0 mm /spl times/ 6.0 mm /spl times/ 0.4 mm. We experimentally evaluated the device characteristics by using silicone rubbers with different hardnesses as the model materials, and we verified the hardness detection performance. The fabricated tactile sensor detected differences in hardness in the range of 10/sup 3/ to 10/sup 5/ N/m.
Keywords :
diaphragms; hardness; micromachining; piezoresistive devices; silicone rubber; tactile sensors; contact force; diaphragm; hardness detection; humanfinger touch detection; mesa structure; micromachined active tactile sensor; micromachining; piezoresistive strain sensor; pneumatic actuation; silicone rubbers; Capacitive sensors; Force sensors; Image sensors; Immune system; Sensor arrays; Sensor phenomena and characterization; Solid state circuits; Surface texture; Tactile sensors; Transducers;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215627
