DocumentCode
1702019
Title
Prospects of application of mathematical simulation in scanning electron microscopy
Author
Aristov, V.V. ; Dryomova, N.N. ; Zaitsev, S.I. ; Kazmiruk, V.V. ; Ushakov, N.G. ; Firsova, A.A.
Author_Institution
Institute of Problems of Microelectronics Technology and SuperpuTe Materials
fYear
1987
Firstpage
99
Lastpage
114
Abstract
Thus, submicron electron-beam diagnostics calls for construction of physical and mathematical models of signal generation, on the one hand, and development of efficient signal processing techniques, on the other hand. Mathematical simulation is one of the most essential means of solving these problems. The paper reports the results of application of the mathematical simulation method to solving the two problems of scanning electron microscopy. The possibility of its employment in submicron diagnostics is considered.
Keywords
Electron emission; Materials science and technology; Microelectronics; Particle scattering; Probes; Scanning electron microscopy; Signal generators; Signal processing; Size measurement; X-ray scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Analysis of Semiconductor Devices and Integrated Circuits, 1987. NASECODE V. Proceedings of the Fifth International Conference on the
Conference_Location
Dublin, Ireland
Print_ISBN
0-906783-72-0
Type
conf
DOI
10.1109/NASCOD.1987.721129
Filename
721129
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