• DocumentCode
    1702504
  • Title

    Interactive process simulation program for analysis and synthesis

  • Author

    Koltai, M. ; Trutz, S.

  • Author_Institution
    Technical University Budapest
  • fYear
    1987
  • Firstpage
    264
  • Lastpage
    269
  • Abstract
    Interactive process simulation program called MICRO-APT has been extended with an algorithm, predicting process parameters in order to get a specified structure. This algorithm can be considered as a process parameter synthesis procedure as opposed to the usual analysis with a given set of parameters. Description of the algorithm and examples are given in the paper.
  • Keywords
    Algorithm design and analysis; Analytical models; Conductivity; Impurities; Microelectronics; Oxidation; Prediction algorithms; Predictive models; Silicon; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Numerical Analysis of Semiconductor Devices and Integrated Circuits, 1987. NASECODE V. Proceedings of the Fifth International Conference on the
  • Conference_Location
    Dublin, Ireland
  • Print_ISBN
    0-906783-72-0
  • Type

    conf

  • DOI
    10.1109/NASCOD.1987.721190
  • Filename
    721190
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1702504