Traceability for on-wafer CPW S-parameter measurements

Author

Bannister, D.J. ; Smith, D.I.

Author_Institution

NPL, Teddington, UK

fYear

1993

fDate

10/19/1993 12:00:00 AM

Firstpage

42552

Lastpage

42557

Abstract

Formal quality systems such as the ISO 9000/BS 5750 series standards have created a growing requirement for electrical measurements to be traceable to nationally and internationally certified units such as the SI ohm, watt, and metre. For on-wafer scattering parameter measurement, results are referenced back to fundamental standards via the on-wafer impedance standards used in automatic network analyser (ANA) calibration. This paper describes work at the National Physical Laboratory towards the production of coplanar waveguide (CPW) calibration standards of certified quality on GaAs substrates

Keywords

III-V semiconductors; MMIC; S-parameters; integrated circuit testing; measurement standards; microstrip lines; microwave measurement; network analysers; GaAs; ISO 9000/BS 5750 series standards; National Physical Laboratory; automatic network analyser; certified units; electrical measurements; on-wafer CPW S-parameter measurements; on-wafer impedance standards;

fLanguage

English

Publisher

iet

Conference_Titel

Analysis, Design and Applications of Coplanar Waveguides, IEE Colloquium on

Conference_Location

London

Type

conf

Filename

280343

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1703097