DocumentCode
1703533
Title
Self-aligned Ohmic And Self-Aligned Implant GaAs Gate FET With Integrated Diode
Author
Yuen, A.T. ; Long, S.I. ; Hu, E.L. ; Patterson, G.A.
Author_Institution
University of California
fYear
1987
Firstpage
160
Lastpage
166
Keywords
FETs; Fabrication; Gallium arsenide; Gold; Implants; Microwave technology; Schottky diodes; Semiconductor diodes; Threshold voltage; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
High Speed Semiconductor Devices and Circuits, 1987. Proceedings., IEEE/Cornell Conference on Advanced Concepts in
Conference_Location
Ithaca, NY, USA
Type
conf
DOI
10.1109/CORNEL.1987.721225
Filename
721225
Link To Document