MEMS for integrated timing and spectral processing

This paper presents a review of micro-electromechanical devices for frequency references and RF spectral processing. The application of high-Q pure silicon and AlN-on-silicon bulk acoustic wave resonators in low phase-noise reference oscillators is discussed and compensation challenges are described. Low-loss piezo-acoustic filters and high-Q tunable and switchable silver passives are presented for applications in multi-mode front-end modules and spectral processors.