Title :
MEMS for integrated timing and spectral processing
Author_Institution :
Center for MEMS & Microsyst. Technol., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
This paper presents a review of micro-electromechanical devices for frequency references and RF spectral processing. The application of high-Q pure silicon and AlN-on-silicon bulk acoustic wave resonators in low phase-noise reference oscillators is discussed and compensation challenges are described. Low-loss piezo-acoustic filters and high-Q tunable and switchable silver passives are presented for applications in multi-mode front-end modules and spectral processors.
Keywords :
bulk acoustic wave devices; matched filters; micromechanical resonators; MEMS; RF spectral processing; bulk acoustic wave resonators; high-Q tunable and switchable silver passives; integrated timing and spectral processing; low phase-noise reference oscillators; low-loss piezo-acoustic filters; Acoustic waves; Microelectromechanical devices; Micromechanical devices; Oscillators; Radio frequency; Resonator filters; Silicon; Silver; Timing;
Conference_Titel :
Custom Integrated Circuits Conference, 2009. CICC '09. IEEE
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4244-4071-9
Electronic_ISBN :
978-1-4244-4073-3
DOI :
10.1109/CICC.2009.5280888
