Title :
Finger beam geometrical behavior analysis of a non-crossing differential capacitive MEMS accelerometer
Author :
Tamsir, Agus Santoso ; Saharil, Farizah ; Majlis, Burhanuddin Yeop
Author_Institution :
Inst. of Microengineering & Nanoelectronics, Univ. Kebangsaan Malaysia, Selangor, Malaysia
Abstract :
The main objective of this work is to perform a feasibility study on the geometrical behavior of finger beam of a non-crossing differential capacitive accelerometer. The non-crossing differential capacitive accelerometer has an advantage as to the crossing differential capacitive type because of its linear sensitivity. This paper discusses the effect of a beam deflection in designing a MEMS accelerometer due to the acceleration and the reactive force. From the simulation, the optimum geometrical size found is 200 μm finger length with width varies from 1.75 μm to 2.5 μm.
Keywords :
accelerometers; microsensors; sensitivity analysis; 1.75 micron; 2.5 micron; 200 micron; beam deflection; finger beam geometrical behavior analysis; linear sensitivity; noncrossing differential capacitive MEMS accelerometer; Acceleration; Accelerometers; Circuits; Electrodes; Fingers; IEEE members; Micromechanical devices; Nanoelectronics; Particle beams; Solid modeling;
Conference_Titel :
Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Print_ISBN :
0-7803-8658-2
DOI :
10.1109/SMELEC.2004.1620974
