Title :
Optical signal injection for high-speed wafer level function test of integrated circuits
Author :
Berger, Horst H. ; Sturm, Johannes ; Esfahani, Farzad ; Benedix, Alexander ; Von Aichberger, Susanne ; Muller, Bernt ; Hofacker, Karl-otto
Author_Institution :
Inst. of Microelectron. & Solid State Electron., Tech. Univ. Berlin, Germany
Abstract :
Conventional needle probe techniques do not permit wafer level tests at frequencies above about 100 MHz. As an alternative to special probes like microwave strip lines optical inputs have been designed which have been shown to operate up to 800 MHz in 1.2 μm BiCMOS technology. They are process compatible and require an area less than that of a standard aluminum pad
Keywords :
BiCMOS integrated circuits; failure analysis; integrated circuit testing; 1.2 micron; 100 to 800 MHz; BiCMOS technology; IC testing; area; failure localization; high-speed wafer level function test; optical signal injection; process compatible; wafer level tests; Aluminum; BiCMOS integrated circuits; Frequency; High speed optical techniques; Microwave technology; Needles; Optical design; Probes; Strips; Testing;
Conference_Titel :
Microelectronic Test Structures, 1997. ICMTS 1997. Proceedings. IEEE International Conference on
Conference_Location :
Monterey, CA
Print_ISBN :
0-7803-3243-1
DOI :
10.1109/ICMTS.1997.589326
